Chromatic Confocal Displacement Sensor, 3 nm Repeatability

Overview

The Chromatic Confocal Displacement Sensor is designed for high-precision non-contact measurement. It is suitable for displacement, height, surface position, and thickness measurement in precision industrial inspection applications.

Key Features

• High-precision non-contact measurement
• 3 nm repeatability
• ±0.05 mm measuring range
• 8 mm reference distance
• Compact Φ40 × 111.5 mm sensor body
• Suitable for precision parts, glass, metal, semiconductor components, and automation systems

Technical Specifications

Model: SFS-D108
Reference Distance: 8 mm
Measuring Range: ±0.05 mm
Measuring Angle: ±46.5°
Spot Diameter: Φ2.7 / 5.4 μm
Repeatability: 3 nm
Linearity Error: ＜±0.03 μm
Dimensions: Φ40 × 111.5 mm
Weight: 256 g
Protection Rating: IP40

Applications

This confocal displacement sensor can be used for precision displacement measurement, surface height measurement, glass thickness measurement, semiconductor inspection, precision parts inspection, and automated quality control systems.

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Technical References

Learn more about ISO 25178-607 confocal microscopy systems and dimensional metrology for high-accuracy measurement applications.